Visible luminescences from thermally grown silicon dioxide thin films

Won Chel Choi, Min Suk Lee, Eun Kyu Kim, Chun Keun Kim, Suk Ki Min, Chong Yun Park, Jeong Yong Lee

Research output: Contribution to journalArticle

38 Citations (Scopus)

Abstract

We introduce visible photoluminescences (PL) of violet (432 nm) and yellow (561 nm) at room temperature from thermally treated silicon dioxide thin films. These luminescences were very strong with a near infinite degradation time. At an oxide layer thickness less than 200 nm, these luminescences were not seen, even with high temperature annealing at about 1000°C. As a result of photoluminescence, x-ray photoelectron spectroscopy, Fourier transform infrared, and high-resolution transmission electron microscopy measurements, we conclude that the violet PL originates from the nanocrystalline silicon formed in the silicon oxide film by the thermal strain effect between the silicon substrate and the silicon dioxide film, while the yellow PL originates from the radiative decay of self-trapped excitons that are confined to oxygen sufficient structures.

Original languageEnglish
Pages (from-to)3402-3404
Number of pages3
JournalApplied Physics Letters
Volume69
Issue number22
DOIs
StatePublished - 1996 Nov 25

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luminescence
silicon dioxide
photoluminescence
thin films
silicon
silicon oxides
x ray spectroscopy
oxide films
excitons
photoelectron spectroscopy
degradation
transmission electron microscopy
annealing
oxides
high resolution
decay
room temperature
oxygen

Cite this

Choi, W. C., Lee, M. S., Kim, E. K., Kim, C. K., Min, S. K., Park, C. Y., & Lee, J. Y. (1996). Visible luminescences from thermally grown silicon dioxide thin films. Applied Physics Letters, 69(22), 3402-3404. https://doi.org/10.1063/1.117273
Choi, Won Chel ; Lee, Min Suk ; Kim, Eun Kyu ; Kim, Chun Keun ; Min, Suk Ki ; Park, Chong Yun ; Lee, Jeong Yong. / Visible luminescences from thermally grown silicon dioxide thin films. In: Applied Physics Letters. 1996 ; Vol. 69, No. 22. pp. 3402-3404.
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Choi, WC, Lee, MS, Kim, EK, Kim, CK, Min, SK, Park, CY & Lee, JY 1996, 'Visible luminescences from thermally grown silicon dioxide thin films', Applied Physics Letters, vol. 69, no. 22, pp. 3402-3404. https://doi.org/10.1063/1.117273

Visible luminescences from thermally grown silicon dioxide thin films. / Choi, Won Chel; Lee, Min Suk; Kim, Eun Kyu; Kim, Chun Keun; Min, Suk Ki; Park, Chong Yun; Lee, Jeong Yong.

In: Applied Physics Letters, Vol. 69, No. 22, 25.11.1996, p. 3402-3404.

Research output: Contribution to journalArticle

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AU - Choi, Won Chel

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