Time-resolved spatial distribution measurements of pulse-modulated argon plasmas in an inductively coupled plasma reactor

Ji Hwan Park, Dong Hwan Kim, Yu Sin Kim, Chin Wook Chung

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

The time variation of the plasma parameters along with their spatial distributions were measured in pulse-modulated (PM) inductively coupled argon plasma via the phase delay harmonic analysis method (PDHAM). During the initial active-glow, the distributions of both the ion flux and the electron temperature in the plasma bulk have M-shaped profiles due to the antenna geometry. Then, while the plasma is approaching a steady state, the spatial distribution evolves into a profile with a convex shape. The effects of the antenna geometry and the time evolution on the distribution profile are lesser under low gas pressure, and diminish at the wafer level. The diffusion of the charged particles and the nonlocal electron kinetics account for these characteristics. It is observed that the initial distribution of the electron temperature is affected by the electron density distribution of the previous after-glow at the wafer level. The distribution profiles at different pulse frequencies were also measured. At higher pulse frequencies, the distribution profile is more frequently smoothed by diffusion during the after-glow, leading to higher uniformity.

Original languageEnglish
Article number055016
JournalPlasma Sources Science and Technology
Volume26
Issue number5
DOIs
StatePublished - 2017 Apr 5

Fingerprint

argon plasma
spatial distribution
reactors
profiles
pulses
luminescence
antennas
wafers
electron energy
harmonic analysis
geometry
gas pressure
density distribution
charged particles
low pressure
kinetics
ions
electrons

Keywords

  • inductively coupled plasma
  • plasma diagnostics
  • plasma distribution
  • plasma parameter
  • plasma uniformity
  • pulse modulated plasma

Cite this

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title = "Time-resolved spatial distribution measurements of pulse-modulated argon plasmas in an inductively coupled plasma reactor",
abstract = "The time variation of the plasma parameters along with their spatial distributions were measured in pulse-modulated (PM) inductively coupled argon plasma via the phase delay harmonic analysis method (PDHAM). During the initial active-glow, the distributions of both the ion flux and the electron temperature in the plasma bulk have M-shaped profiles due to the antenna geometry. Then, while the plasma is approaching a steady state, the spatial distribution evolves into a profile with a convex shape. The effects of the antenna geometry and the time evolution on the distribution profile are lesser under low gas pressure, and diminish at the wafer level. The diffusion of the charged particles and the nonlocal electron kinetics account for these characteristics. It is observed that the initial distribution of the electron temperature is affected by the electron density distribution of the previous after-glow at the wafer level. The distribution profiles at different pulse frequencies were also measured. At higher pulse frequencies, the distribution profile is more frequently smoothed by diffusion during the after-glow, leading to higher uniformity.",
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Time-resolved spatial distribution measurements of pulse-modulated argon plasmas in an inductively coupled plasma reactor. / Park, Ji Hwan; Kim, Dong Hwan; Kim, Yu Sin; Chung, Chin Wook.

In: Plasma Sources Science and Technology, Vol. 26, No. 5, 055016, 05.04.2017.

Research output: Contribution to journalArticle

TY - JOUR

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AU - Park, Ji Hwan

AU - Kim, Dong Hwan

AU - Kim, Yu Sin

AU - Chung, Chin Wook

PY - 2017/4/5

Y1 - 2017/4/5

N2 - The time variation of the plasma parameters along with their spatial distributions were measured in pulse-modulated (PM) inductively coupled argon plasma via the phase delay harmonic analysis method (PDHAM). During the initial active-glow, the distributions of both the ion flux and the electron temperature in the plasma bulk have M-shaped profiles due to the antenna geometry. Then, while the plasma is approaching a steady state, the spatial distribution evolves into a profile with a convex shape. The effects of the antenna geometry and the time evolution on the distribution profile are lesser under low gas pressure, and diminish at the wafer level. The diffusion of the charged particles and the nonlocal electron kinetics account for these characteristics. It is observed that the initial distribution of the electron temperature is affected by the electron density distribution of the previous after-glow at the wafer level. The distribution profiles at different pulse frequencies were also measured. At higher pulse frequencies, the distribution profile is more frequently smoothed by diffusion during the after-glow, leading to higher uniformity.

AB - The time variation of the plasma parameters along with their spatial distributions were measured in pulse-modulated (PM) inductively coupled argon plasma via the phase delay harmonic analysis method (PDHAM). During the initial active-glow, the distributions of both the ion flux and the electron temperature in the plasma bulk have M-shaped profiles due to the antenna geometry. Then, while the plasma is approaching a steady state, the spatial distribution evolves into a profile with a convex shape. The effects of the antenna geometry and the time evolution on the distribution profile are lesser under low gas pressure, and diminish at the wafer level. The diffusion of the charged particles and the nonlocal electron kinetics account for these characteristics. It is observed that the initial distribution of the electron temperature is affected by the electron density distribution of the previous after-glow at the wafer level. The distribution profiles at different pulse frequencies were also measured. At higher pulse frequencies, the distribution profile is more frequently smoothed by diffusion during the after-glow, leading to higher uniformity.

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