The structure and properties of ta-C film with dispersion of incident beam energy

S. H. Lee, T. Y. Kim, S. C. Lee, Yong-Chae Chung, D. W. Brenner, K. R. Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Structures and properties of tetrahedral amorphous carbon (ta-C) films are investigated as a function of Gaussian distribution of incident carbon beam energy. The ta-C films are synthesized by controlling the standard deviation (a) of Gaussian distribution from 0 to 10. The Brenner type interatomic potential was used for carbon-carbon interaction. Densities (3.14 ± 0.03 g/cm 3) and sp3 bond fractions (53.7 ±1.7 %) were not significantly changed with varying standard deviations (σ). On the contrary, the compressive residual stresses of ta-C film were changed remarkably with changing the standard deviation. The residual stress was reduced from 6.0 to 4.2 GPa with the standard deviations (σ). The decrease of residual stress corresponds to the disappearance of a satellite peak of the second nearest neighbor of the radial distribution function. The relationship between the structure of ta-C film and dispersion of incident beam energy was investigated.

Original languageEnglish
Title of host publication2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings
EditorsM. Laudon, B. Romanowicz
Pages218-221
Number of pages4
StatePublished - 2005 Dec 1
Event2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 - Anaheim, CA, United States
Duration: 2005 May 82005 May 12

Publication series

Name2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings

Other

Other2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005
CountryUnited States
CityAnaheim, CA
Period05/05/805/05/12

Fingerprint

Carbon films
Amorphous carbon
Amorphous films
Residual stresses
Gaussian distribution
Carbon
Compressive stress
Distribution functions
Satellites

Keywords

  • Compressive residual stress
  • Dispersed incident energy
  • Molecular dynamics simulation
  • Tetrahedral amorphous carbon

Cite this

Lee, S. H., Kim, T. Y., Lee, S. C., Chung, Y-C., Brenner, D. W., & Lee, K. R. (2005). The structure and properties of ta-C film with dispersion of incident beam energy. In M. Laudon, & B. Romanowicz (Eds.), 2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings (pp. 218-221). (2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings).
Lee, S. H. ; Kim, T. Y. ; Lee, S. C. ; Chung, Yong-Chae ; Brenner, D. W. ; Lee, K. R. / The structure and properties of ta-C film with dispersion of incident beam energy. 2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings. editor / M. Laudon ; B. Romanowicz. 2005. pp. 218-221 (2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings).
@inproceedings{32b2475b6480431c88c9b97eecbbdd62,
title = "The structure and properties of ta-C film with dispersion of incident beam energy",
abstract = "Structures and properties of tetrahedral amorphous carbon (ta-C) films are investigated as a function of Gaussian distribution of incident carbon beam energy. The ta-C films are synthesized by controlling the standard deviation (a) of Gaussian distribution from 0 to 10. The Brenner type interatomic potential was used for carbon-carbon interaction. Densities (3.14 ± 0.03 g/cm 3) and sp3 bond fractions (53.7 ±1.7 {\%}) were not significantly changed with varying standard deviations (σ). On the contrary, the compressive residual stresses of ta-C film were changed remarkably with changing the standard deviation. The residual stress was reduced from 6.0 to 4.2 GPa with the standard deviations (σ). The decrease of residual stress corresponds to the disappearance of a satellite peak of the second nearest neighbor of the radial distribution function. The relationship between the structure of ta-C film and dispersion of incident beam energy was investigated.",
keywords = "Compressive residual stress, Dispersed incident energy, Molecular dynamics simulation, Tetrahedral amorphous carbon",
author = "Lee, {S. H.} and Kim, {T. Y.} and Lee, {S. C.} and Yong-Chae Chung and Brenner, {D. W.} and Lee, {K. R.}",
year = "2005",
month = "12",
day = "1",
language = "English",
isbn = "0976798514",
series = "2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings",
pages = "218--221",
editor = "M. Laudon and B. Romanowicz",
booktitle = "2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings",

}

Lee, SH, Kim, TY, Lee, SC, Chung, Y-C, Brenner, DW & Lee, KR 2005, The structure and properties of ta-C film with dispersion of incident beam energy. in M Laudon & B Romanowicz (eds), 2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings. 2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings, pp. 218-221, 2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005, Anaheim, CA, United States, 05/05/8.

The structure and properties of ta-C film with dispersion of incident beam energy. / Lee, S. H.; Kim, T. Y.; Lee, S. C.; Chung, Yong-Chae; Brenner, D. W.; Lee, K. R.

2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings. ed. / M. Laudon; B. Romanowicz. 2005. p. 218-221 (2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - The structure and properties of ta-C film with dispersion of incident beam energy

AU - Lee, S. H.

AU - Kim, T. Y.

AU - Lee, S. C.

AU - Chung, Yong-Chae

AU - Brenner, D. W.

AU - Lee, K. R.

PY - 2005/12/1

Y1 - 2005/12/1

N2 - Structures and properties of tetrahedral amorphous carbon (ta-C) films are investigated as a function of Gaussian distribution of incident carbon beam energy. The ta-C films are synthesized by controlling the standard deviation (a) of Gaussian distribution from 0 to 10. The Brenner type interatomic potential was used for carbon-carbon interaction. Densities (3.14 ± 0.03 g/cm 3) and sp3 bond fractions (53.7 ±1.7 %) were not significantly changed with varying standard deviations (σ). On the contrary, the compressive residual stresses of ta-C film were changed remarkably with changing the standard deviation. The residual stress was reduced from 6.0 to 4.2 GPa with the standard deviations (σ). The decrease of residual stress corresponds to the disappearance of a satellite peak of the second nearest neighbor of the radial distribution function. The relationship between the structure of ta-C film and dispersion of incident beam energy was investigated.

AB - Structures and properties of tetrahedral amorphous carbon (ta-C) films are investigated as a function of Gaussian distribution of incident carbon beam energy. The ta-C films are synthesized by controlling the standard deviation (a) of Gaussian distribution from 0 to 10. The Brenner type interatomic potential was used for carbon-carbon interaction. Densities (3.14 ± 0.03 g/cm 3) and sp3 bond fractions (53.7 ±1.7 %) were not significantly changed with varying standard deviations (σ). On the contrary, the compressive residual stresses of ta-C film were changed remarkably with changing the standard deviation. The residual stress was reduced from 6.0 to 4.2 GPa with the standard deviations (σ). The decrease of residual stress corresponds to the disappearance of a satellite peak of the second nearest neighbor of the radial distribution function. The relationship between the structure of ta-C film and dispersion of incident beam energy was investigated.

KW - Compressive residual stress

KW - Dispersed incident energy

KW - Molecular dynamics simulation

KW - Tetrahedral amorphous carbon

UR - http://www.scopus.com/inward/record.url?scp=32144463673&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:32144463673

SN - 0976798514

T3 - 2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings

SP - 218

EP - 221

BT - 2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings

A2 - Laudon, M.

A2 - Romanowicz, B.

ER -

Lee SH, Kim TY, Lee SC, Chung Y-C, Brenner DW, Lee KR. The structure and properties of ta-C film with dispersion of incident beam energy. In Laudon M, Romanowicz B, editors, 2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings. 2005. p. 218-221. (2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings).