Study on the electrical properties of direct-patternable SBT films formed by photochemical metal-organic deposition

Hyeong Ho Park, Hyung Ho Park, Ho Jung Chang, Hyeongtag Jeon

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The ferroelectric properties of UV irradiated and non-irradiated SBT thin films using photosensitive starting precursors were investigated. The observation of surface microstructure showed that UV irradiation and increase in anneal temperature induced the grain growth of SBT. The measured remnant polarization values of UV irradiated and non-irradiated SBT films after anneal at 700°C were 5.8 and 4.7 μC/cm2 and after anneal at 750°C, the values were 10.8 and 9.3 μC/cm2, respectively.

Original languageEnglish
Title of host publicationEco-Materials Processing and Design VIII - ISEPD-8, Proceedings of the 8th International Symposium on Eco-Materials Processing and Design
Pages1061-1064
Number of pages4
StatePublished - 2007 Dec 1
Event8th International Symposium on Eco-Materials Processing and Design, ISEPD-8 - Kitakyushu, Japan
Duration: 2007 Jan 112007 Jan 13

Publication series

NameMaterials Science Forum
Volume544-545
ISSN (Print)0255-5476

Other

Other8th International Symposium on Eco-Materials Processing and Design, ISEPD-8
CountryJapan
CityKitakyushu
Period07/01/1107/01/13

Fingerprint

Grain growth
Ferroelectric materials
Electric properties
Metals
electrical properties
Irradiation
Polarization
Thin films
microstructure
Microstructure
irradiation
polarization
thin films
metals
Temperature
temperature

Keywords

  • Direct-patterning
  • Photochemical reaction
  • Photoresist-free
  • SBT
  • UV irradiation

Cite this

Park, H. H., Park, H. H., Chang, H. J., & Jeon, H. (2007). Study on the electrical properties of direct-patternable SBT films formed by photochemical metal-organic deposition. In Eco-Materials Processing and Design VIII - ISEPD-8, Proceedings of the 8th International Symposium on Eco-Materials Processing and Design (pp. 1061-1064). (Materials Science Forum; Vol. 544-545).
Park, Hyeong Ho ; Park, Hyung Ho ; Chang, Ho Jung ; Jeon, Hyeongtag. / Study on the electrical properties of direct-patternable SBT films formed by photochemical metal-organic deposition. Eco-Materials Processing and Design VIII - ISEPD-8, Proceedings of the 8th International Symposium on Eco-Materials Processing and Design. 2007. pp. 1061-1064 (Materials Science Forum).
@inproceedings{c50d2ca600014527b72951332f2a478f,
title = "Study on the electrical properties of direct-patternable SBT films formed by photochemical metal-organic deposition",
abstract = "The ferroelectric properties of UV irradiated and non-irradiated SBT thin films using photosensitive starting precursors were investigated. The observation of surface microstructure showed that UV irradiation and increase in anneal temperature induced the grain growth of SBT. The measured remnant polarization values of UV irradiated and non-irradiated SBT films after anneal at 700°C were 5.8 and 4.7 μC/cm2 and after anneal at 750°C, the values were 10.8 and 9.3 μC/cm2, respectively.",
keywords = "Direct-patterning, Photochemical reaction, Photoresist-free, SBT, UV irradiation",
author = "Park, {Hyeong Ho} and Park, {Hyung Ho} and Chang, {Ho Jung} and Hyeongtag Jeon",
year = "2007",
month = "12",
day = "1",
language = "English",
isbn = "0878494316",
series = "Materials Science Forum",
pages = "1061--1064",
booktitle = "Eco-Materials Processing and Design VIII - ISEPD-8, Proceedings of the 8th International Symposium on Eco-Materials Processing and Design",

}

Park, HH, Park, HH, Chang, HJ & Jeon, H 2007, Study on the electrical properties of direct-patternable SBT films formed by photochemical metal-organic deposition. in Eco-Materials Processing and Design VIII - ISEPD-8, Proceedings of the 8th International Symposium on Eco-Materials Processing and Design. Materials Science Forum, vol. 544-545, pp. 1061-1064, 8th International Symposium on Eco-Materials Processing and Design, ISEPD-8, Kitakyushu, Japan, 07/01/11.

Study on the electrical properties of direct-patternable SBT films formed by photochemical metal-organic deposition. / Park, Hyeong Ho; Park, Hyung Ho; Chang, Ho Jung; Jeon, Hyeongtag.

Eco-Materials Processing and Design VIII - ISEPD-8, Proceedings of the 8th International Symposium on Eco-Materials Processing and Design. 2007. p. 1061-1064 (Materials Science Forum; Vol. 544-545).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Study on the electrical properties of direct-patternable SBT films formed by photochemical metal-organic deposition

AU - Park, Hyeong Ho

AU - Park, Hyung Ho

AU - Chang, Ho Jung

AU - Jeon, Hyeongtag

PY - 2007/12/1

Y1 - 2007/12/1

N2 - The ferroelectric properties of UV irradiated and non-irradiated SBT thin films using photosensitive starting precursors were investigated. The observation of surface microstructure showed that UV irradiation and increase in anneal temperature induced the grain growth of SBT. The measured remnant polarization values of UV irradiated and non-irradiated SBT films after anneal at 700°C were 5.8 and 4.7 μC/cm2 and after anneal at 750°C, the values were 10.8 and 9.3 μC/cm2, respectively.

AB - The ferroelectric properties of UV irradiated and non-irradiated SBT thin films using photosensitive starting precursors were investigated. The observation of surface microstructure showed that UV irradiation and increase in anneal temperature induced the grain growth of SBT. The measured remnant polarization values of UV irradiated and non-irradiated SBT films after anneal at 700°C were 5.8 and 4.7 μC/cm2 and after anneal at 750°C, the values were 10.8 and 9.3 μC/cm2, respectively.

KW - Direct-patterning

KW - Photochemical reaction

KW - Photoresist-free

KW - SBT

KW - UV irradiation

UR - http://www.scopus.com/inward/record.url?scp=38349136258&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:38349136258

SN - 0878494316

SN - 9780878494316

T3 - Materials Science Forum

SP - 1061

EP - 1064

BT - Eco-Materials Processing and Design VIII - ISEPD-8, Proceedings of the 8th International Symposium on Eco-Materials Processing and Design

ER -

Park HH, Park HH, Chang HJ, Jeon H. Study on the electrical properties of direct-patternable SBT films formed by photochemical metal-organic deposition. In Eco-Materials Processing and Design VIII - ISEPD-8, Proceedings of the 8th International Symposium on Eco-Materials Processing and Design. 2007. p. 1061-1064. (Materials Science Forum).