Shock protection using integrated nonlinear spring shock stops

Sang Won Yoon, N. Yazdi, J. Chae, N. C. Perkins, K. Najafi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Citations (Scopus)

Abstract

This paper reports the fabrication and testing of integrated nonlinear spring shock stops to protect micromachined devices. This approach enables a generic batch micro-packaging technology providing superior shock protection over conventional hard shock stops, and can be conveniently integrated with micromachined devices without additional fabrication processes and excessive area expansion. These advantages are demonstrated by integrating the nonlinear spring shock stops with a capacitive and with a piezoresistive MEMS accelerometer fabricated by different processes. Conducted shock tests reveal that the nonlinear stops provide substantial device survival rate (83%) compared with hard stops (8%). The device fracture mechanisms are also identified

Original languageEnglish
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages702-705
Number of pages4
Volume2006
StatePublished - 2006 Oct 24
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: 2006 Jan 222006 Jan 26

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
CountryTurkey
CityIstanbul
Period06/01/2206/01/26

Fingerprint

shock
Fabrication
Accelerometers
MEMS
Packaging
shock tests
fabrication
Testing
accelerometers
packaging
microelectromechanical systems
expansion

Cite this

Yoon, S. W., Yazdi, N., Chae, J., Perkins, N. C., & Najafi, K. (2006). Shock protection using integrated nonlinear spring shock stops. In 19th IEEE International Conference on Micro Electro Mechanical Systems (Vol. 2006, pp. 702-705). [1627896]
Yoon, Sang Won ; Yazdi, N. ; Chae, J. ; Perkins, N. C. ; Najafi, K. / Shock protection using integrated nonlinear spring shock stops. 19th IEEE International Conference on Micro Electro Mechanical Systems. Vol. 2006 2006. pp. 702-705
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Yoon, SW, Yazdi, N, Chae, J, Perkins, NC & Najafi, K 2006, Shock protection using integrated nonlinear spring shock stops. in 19th IEEE International Conference on Micro Electro Mechanical Systems. vol. 2006, 1627896, pp. 702-705, 19th IEEE International Conference on Micro Electro Mechanical Systems, Istanbul, Turkey, 06/01/22.

Shock protection using integrated nonlinear spring shock stops. / Yoon, Sang Won; Yazdi, N.; Chae, J.; Perkins, N. C.; Najafi, K.

19th IEEE International Conference on Micro Electro Mechanical Systems. Vol. 2006 2006. p. 702-705 1627896.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Yoon SW, Yazdi N, Chae J, Perkins NC, Najafi K. Shock protection using integrated nonlinear spring shock stops. In 19th IEEE International Conference on Micro Electro Mechanical Systems. Vol. 2006. 2006. p. 702-705. 1627896