Pulsed floating-type Langmuir probe for measurements of electron energy distribution function in plasmas

Ikjin Choi, Aram Kim, Hyo Chang Lee, Dong Hwan Kim, ChinWook Chung

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Abstract

A floating type Langmuir probe was studied to measure the electron energy distribution function (EEDF) in plasmas. This method measures the current (I)-voltage (V) curve with rising and falling variations based on a floating potential by using charge-discharge characteristics of the series capacitor when a square-pulse voltage is applied. In addition, this method measures the EEDF by using the alternating current (ac) superposition method. The measured EEDFs were in good agreement with results from a conventional single Langmuir probe. This technique could be applied as a plasma diagnostic method in the capacitively coupled plasma where the plasma potential is extremely high or the processing plasma where the deposition gas is used.

Original languageEnglish
Article number013508
JournalPhysics of Plasmas
Volume24
Issue number1
DOIs
StatePublished - 2017 Jan 1

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