Positive charge effect in atomic force microscope anodization lithography using self-assembled monolayers of metal phosphate as resists

Sang Min Kim, Haiwon Lee

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

Self-assembled monolayers of metal phosphate as resists on silicon substrates were prepared for atomic force microscope (AFM) anodization lithography. By binding tetravalent or divalent metal ions on a phosphorylated Si substrate the metal phosphate monolayers were prepared. The lithographic scan speed was enhanced by the order of magnitude in the presence of the positive ions. The results show that the presence of positively charged metal ions in case of Zr4+ and Hf4+ enhances the electron transfer from a tip to a substrate under a tip negative bias.

Original languageEnglish
Pages (from-to)2398-2403
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number6
StatePublished - 2003 Jan 1

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Self assembled monolayers
Lithography
phosphates
Phosphates
Microscopes
lithography
microscopes
Metal ions
metal ions
Substrates
Metals
metals
positive ions
Monolayers
electron transfer
Positive ions
Silicon
Electrons
silicon

Cite this

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abstract = "Self-assembled monolayers of metal phosphate as resists on silicon substrates were prepared for atomic force microscope (AFM) anodization lithography. By binding tetravalent or divalent metal ions on a phosphorylated Si substrate the metal phosphate monolayers were prepared. The lithographic scan speed was enhanced by the order of magnitude in the presence of the positive ions. The results show that the presence of positively charged metal ions in case of Zr4+ and Hf4+ enhances the electron transfer from a tip to a substrate under a tip negative bias.",
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N2 - Self-assembled monolayers of metal phosphate as resists on silicon substrates were prepared for atomic force microscope (AFM) anodization lithography. By binding tetravalent or divalent metal ions on a phosphorylated Si substrate the metal phosphate monolayers were prepared. The lithographic scan speed was enhanced by the order of magnitude in the presence of the positive ions. The results show that the presence of positively charged metal ions in case of Zr4+ and Hf4+ enhances the electron transfer from a tip to a substrate under a tip negative bias.

AB - Self-assembled monolayers of metal phosphate as resists on silicon substrates were prepared for atomic force microscope (AFM) anodization lithography. By binding tetravalent or divalent metal ions on a phosphorylated Si substrate the metal phosphate monolayers were prepared. The lithographic scan speed was enhanced by the order of magnitude in the presence of the positive ions. The results show that the presence of positively charged metal ions in case of Zr4+ and Hf4+ enhances the electron transfer from a tip to a substrate under a tip negative bias.

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