Particle deposition velocity onto a face-up flat surface in a laminar parallel flow considering Brownian diffusion and gravitational settling

Se-Jin Yook, Christof Asbach, Kang Ho Ahn

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

The Gaussian Diffusion Sphere Model (GDSM) was developed and improved to reflect the effects of gravitational settling as well as Brownian diffusion of aerosol particles on deposition velocity onto a face-up flat surface in a laminar parallel flow. The model improvement also includes the applicability of the GDSM to a flat surface of any shape with finite dimensions. When deposition velocity for a face-up circular flat plate of 45. cm diameter, representing e.g. a semiconductor wafer in a laminar parallel flow, was calculated by the GDSM and compared with that by the theory of Liu and Ahn (1987). Particle deposition on semiconductor wafers. Aerosol Science and Technology, 6, 215-224, the agreement was good for the tested particle sizes ranging 0.003-1 γm and free stream velocities ranging 5-500. cm/s. Based on this result, deposition velocities onto the face-up square flat plates with different orientations in a laminar parallel flow, simulating e.g. photomasks, were predicted.

Original languageEnglish
Pages (from-to)911-920
Number of pages10
JournalJournal of Aerosol Science
Volume41
Issue number10
DOIs
StatePublished - 2010 Jan 1

Fingerprint

Parallel flow
deposition velocity
Aerosols
Particles (particulate matter)
Semiconductor materials
aerosol
Photomasks
science and technology
Particle size
particle size
particle
semiconductor

Keywords

  • Brownian diffusion
  • Deposition velocity
  • GDSM
  • Gravitational settling
  • Parallel flow

Cite this

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abstract = "The Gaussian Diffusion Sphere Model (GDSM) was developed and improved to reflect the effects of gravitational settling as well as Brownian diffusion of aerosol particles on deposition velocity onto a face-up flat surface in a laminar parallel flow. The model improvement also includes the applicability of the GDSM to a flat surface of any shape with finite dimensions. When deposition velocity for a face-up circular flat plate of 45. cm diameter, representing e.g. a semiconductor wafer in a laminar parallel flow, was calculated by the GDSM and compared with that by the theory of Liu and Ahn (1987). Particle deposition on semiconductor wafers. Aerosol Science and Technology, 6, 215-224, the agreement was good for the tested particle sizes ranging 0.003-1 γm and free stream velocities ranging 5-500. cm/s. Based on this result, deposition velocities onto the face-up square flat plates with different orientations in a laminar parallel flow, simulating e.g. photomasks, were predicted.",
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Particle deposition velocity onto a face-up flat surface in a laminar parallel flow considering Brownian diffusion and gravitational settling. / Yook, Se-Jin; Asbach, Christof; Ahn, Kang Ho.

In: Journal of Aerosol Science, Vol. 41, No. 10, 01.01.2010, p. 911-920.

Research output: Contribution to journalArticle

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