Organized molecular assemblies for scanning probe microscope lithography

Haiwon Lee, Yun Kyung Jang, Eun Ju Bae, Wonbae Lee, Sang Min Kim, Seung Hyun Lee

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Nanostructures down to a few ten nanometers in size have been fabricated with Langmuir-Blodgett (LB) films and self-assembled monolayers (SAMs) using scanning probe microscope lithography. The SAMs have been prepared with organosilane and bipolar amphiphiles, alkanethiol molecules as ultrathin resists on Si and Au substrates. The LB films on silicon substrates using both the polymer of thiophene derivatives and the mixture of palmitic acid and hexadecylamine were prepared and fabricated. The effect of functional groups of molecules on the atomic force microscope (AFM) anodization has been studied in the optimized process conditions. Applied voltage between the AFM tip and sample, the scanning speed and the relative humidity in the laboratory are also important factors for nanometer-scale lithography of the ultrathin films. The STM lithography with an octadecanethiol SAM on Au film in the air was carried out at the pulse mode of tip bias with respect to the suitability of STM lithography. The high structural orderness and perfect thickness of ultrathin organic molecular assemblies are the major advantages as required for nanoscale lithography.

Original languageEnglish
Pages (from-to)85-90
Number of pages6
JournalCurrent Applied Physics
Volume2
Issue number1
StatePublished - 2002 Jan 1

Fingerprint

Lithography
assemblies
Microscopes
lithography
microscopes
Scanning
Self assembled monolayers
scanning
probes
Langmuir Blodgett films
Langmuir-Blodgett films
palmitic acid
Palmitic acid
Thiophenes
Amphiphiles
Molecules
Palmitic Acid
Ultrathin films
Thiophene
Silicon

Keywords

  • Langmuir-Blodgeff microscope
  • Nanolithography
  • Nanostructure
  • Self-assembled monolayer

Cite this

Lee, H., Jang, Y. K., Bae, E. J., Lee, W., Kim, S. M., & Lee, S. H. (2002). Organized molecular assemblies for scanning probe microscope lithography. Current Applied Physics, 2(1), 85-90.
Lee, Haiwon ; Jang, Yun Kyung ; Bae, Eun Ju ; Lee, Wonbae ; Kim, Sang Min ; Lee, Seung Hyun. / Organized molecular assemblies for scanning probe microscope lithography. In: Current Applied Physics. 2002 ; Vol. 2, No. 1. pp. 85-90.
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Lee, H, Jang, YK, Bae, EJ, Lee, W, Kim, SM & Lee, SH 2002, 'Organized molecular assemblies for scanning probe microscope lithography', Current Applied Physics, vol. 2, no. 1, pp. 85-90.

Organized molecular assemblies for scanning probe microscope lithography. / Lee, Haiwon; Jang, Yun Kyung; Bae, Eun Ju; Lee, Wonbae; Kim, Sang Min; Lee, Seung Hyun.

In: Current Applied Physics, Vol. 2, No. 1, 01.01.2002, p. 85-90.

Research output: Contribution to journalArticle

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Lee H, Jang YK, Bae EJ, Lee W, Kim SM, Lee SH. Organized molecular assemblies for scanning probe microscope lithography. Current Applied Physics. 2002 Jan 1;2(1):85-90.