Optical characteristic analysis of the boronization process by using carborane

Wonwook Lee, Kyungdeuk Park, Young Sun Choi, Cha-Hwan Oh

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Boronization with carborane (C2B10H12) was archieved in a vacuum vessel coupled to a filament discharge system. Optical emission spectroscopy was employed to characterize the boronization process. The Balmer lines of hydrogen and deuterium were measured, and the boronization process was analyzed by using the intensity ratio of the Hα to the Dα line (IH/ID). The relation between the pressure and the intensity ratio was investigated, and the thickness of the deposited boron film was predicted. Also, the dilution ratio H/(H + D) of the boron film was analyzed and compared with the one predicted from an optical analysis of the emission spectrum.

Original languageEnglish
Pages (from-to)640-644
Number of pages5
JournalJournal of the Korean Physical Society
Volume65
Issue number5
DOIs
StatePublished - 2014 Sep 1

Fingerprint

carborane
boron
D lines
optical emission spectroscopy
vessels
dilution
deuterium
filaments
emission spectra
vacuum
hydrogen

Keywords

  • Balmer line
  • Boron
  • Optical emission spectroscopy

Cite this

Lee, Wonwook ; Park, Kyungdeuk ; Choi, Young Sun ; Oh, Cha-Hwan. / Optical characteristic analysis of the boronization process by using carborane. In: Journal of the Korean Physical Society. 2014 ; Vol. 65, No. 5. pp. 640-644.
@article{4d2ca7e16d974256b257f324cc83f185,
title = "Optical characteristic analysis of the boronization process by using carborane",
abstract = "Boronization with carborane (C2B10H12) was archieved in a vacuum vessel coupled to a filament discharge system. Optical emission spectroscopy was employed to characterize the boronization process. The Balmer lines of hydrogen and deuterium were measured, and the boronization process was analyzed by using the intensity ratio of the Hα to the Dα line (IH/ID). The relation between the pressure and the intensity ratio was investigated, and the thickness of the deposited boron film was predicted. Also, the dilution ratio H/(H + D) of the boron film was analyzed and compared with the one predicted from an optical analysis of the emission spectrum.",
keywords = "Balmer line, Boron, Optical emission spectroscopy",
author = "Wonwook Lee and Kyungdeuk Park and Choi, {Young Sun} and Cha-Hwan Oh",
year = "2014",
month = "9",
day = "1",
doi = "10.3938/jkps.65.640",
language = "English",
volume = "65",
pages = "640--644",
journal = "Journal of the Korean Physical Society",
issn = "0374-4884",
number = "5",

}

Optical characteristic analysis of the boronization process by using carborane. / Lee, Wonwook; Park, Kyungdeuk; Choi, Young Sun; Oh, Cha-Hwan.

In: Journal of the Korean Physical Society, Vol. 65, No. 5, 01.09.2014, p. 640-644.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Optical characteristic analysis of the boronization process by using carborane

AU - Lee, Wonwook

AU - Park, Kyungdeuk

AU - Choi, Young Sun

AU - Oh, Cha-Hwan

PY - 2014/9/1

Y1 - 2014/9/1

N2 - Boronization with carborane (C2B10H12) was archieved in a vacuum vessel coupled to a filament discharge system. Optical emission spectroscopy was employed to characterize the boronization process. The Balmer lines of hydrogen and deuterium were measured, and the boronization process was analyzed by using the intensity ratio of the Hα to the Dα line (IH/ID). The relation between the pressure and the intensity ratio was investigated, and the thickness of the deposited boron film was predicted. Also, the dilution ratio H/(H + D) of the boron film was analyzed and compared with the one predicted from an optical analysis of the emission spectrum.

AB - Boronization with carborane (C2B10H12) was archieved in a vacuum vessel coupled to a filament discharge system. Optical emission spectroscopy was employed to characterize the boronization process. The Balmer lines of hydrogen and deuterium were measured, and the boronization process was analyzed by using the intensity ratio of the Hα to the Dα line (IH/ID). The relation between the pressure and the intensity ratio was investigated, and the thickness of the deposited boron film was predicted. Also, the dilution ratio H/(H + D) of the boron film was analyzed and compared with the one predicted from an optical analysis of the emission spectrum.

KW - Balmer line

KW - Boron

KW - Optical emission spectroscopy

UR - http://www.scopus.com/inward/record.url?scp=84907614990&partnerID=8YFLogxK

U2 - 10.3938/jkps.65.640

DO - 10.3938/jkps.65.640

M3 - Article

AN - SCOPUS:84907614990

VL - 65

SP - 640

EP - 644

JO - Journal of the Korean Physical Society

JF - Journal of the Korean Physical Society

SN - 0374-4884

IS - 5

ER -