Nonlocal electron kinetics in a planar inductive helium discharge

Sang Hun Seo, ChinWook Chung, Jung In Hong, Hong Young Chang

Research output: Contribution to journalArticle

65 Citations (Scopus)

Abstract

A measurement of the electron energy distribution function (EEDF) using the ac superposition method is done over a helium pressure range of 10–100 mTorr in a planar inductive plasma, and the electron energy diffusion coefficient which describes the electron heating is calculated based on the same discharge conditions using a two-dimensional simulation. It is found that the measured EEDF shows a bi-Maxwellian distribution with a low-energy electron group at low pressures below 20 mTorr even in the inductive discharge using helium of the non-Ramsauer gas. The major factors which can affect the EEDF formation are investigated. In particular, the concept of the total electron bounce frequency, i.e., the electron residence time, is introduced as an indicator of how the electron-electron collision affects the EEDF shape. As a result, it is shown that the observed bi-Maxwellian distribution at low pressures is attributed to the combined effects of the formation of low-energy electrons through the cooling mechanism of energetic electrons enhanced by the capacitive field, the low heating rate of the low-energy electrons, the confinement of low-energy electrons by the ambipolar space potential, and the low electron-electron collision frequency which can be estimated from the total electron bounce frequency presented in this paper.

Original languageEnglish
Pages (from-to)7155-7167
Number of pages13
JournalPhysical Review E - Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics
Volume62
Issue number5
DOIs
StatePublished - 2000 Jan 1

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Kinetics
helium
Electron
electron energy
kinetics
electrons
energy distribution
distribution functions
Maxwell-Boltzmann density function
Energy Distribution
Energy Function
electron scattering
Distribution Function
low pressure
Energy
heating
Bounce
Heating
Collision
diffusion coefficient

Cite this

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abstract = "A measurement of the electron energy distribution function (EEDF) using the ac superposition method is done over a helium pressure range of 10–100 mTorr in a planar inductive plasma, and the electron energy diffusion coefficient which describes the electron heating is calculated based on the same discharge conditions using a two-dimensional simulation. It is found that the measured EEDF shows a bi-Maxwellian distribution with a low-energy electron group at low pressures below 20 mTorr even in the inductive discharge using helium of the non-Ramsauer gas. The major factors which can affect the EEDF formation are investigated. In particular, the concept of the total electron bounce frequency, i.e., the electron residence time, is introduced as an indicator of how the electron-electron collision affects the EEDF shape. As a result, it is shown that the observed bi-Maxwellian distribution at low pressures is attributed to the combined effects of the formation of low-energy electrons through the cooling mechanism of energetic electrons enhanced by the capacitive field, the low heating rate of the low-energy electrons, the confinement of low-energy electrons by the ambipolar space potential, and the low electron-electron collision frequency which can be estimated from the total electron bounce frequency presented in this paper.",
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Nonlocal electron kinetics in a planar inductive helium discharge. / Seo, Sang Hun; Chung, ChinWook; Hong, Jung In; Chang, Hong Young.

In: Physical Review E - Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics, Vol. 62, No. 5, 01.01.2000, p. 7155-7167.

Research output: Contribution to journalArticle

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