Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope

C. K. Hyon, S. C. Choi, S. W. Hwang, D. Ahn, Yong Kim, E. K. Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The authors report the direct fabrication and manipulation of nano-structures by using the cantilever oscillation of an atomic force microscope (AFM). The oscillating cantilever exerts a large enough force to break the surface bond and subsequently remove the atoms. Various reliable groove patterns on GaAs, with fully controlled width and depth, are achieved by adjusting the feedback gain of the AFM and the applied force. Furthermore, the selection and the subsequent removal of individual InAs self-assembled quantum dots is also shown to be possible.

Original languageEnglish
Title of host publication1999 International Microprocesses and Nanotechnology Conference
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages50-51
Number of pages2
ISBN (Electronic)4930813972, 9784930813978
DOIs
Publication statusPublished - 1999 Jan 1
Event1999 International Microprocesses and Nanotechnology Conference - Yokohama, Japan
Duration: 1999 Jul 61999 Jul 8

Publication series

Name1999 International Microprocesses and Nanotechnology Conference

Other

Other1999 International Microprocesses and Nanotechnology Conference
CountryJapan
CityYokohama
Period99/07/699/07/8

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Hyon, C. K., Choi, S. C., Hwang, S. W., Ahn, D., Kim, Y., & Kim, E. K. (1999). Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope. In 1999 International Microprocesses and Nanotechnology Conference (pp. 50-51). [797471] (1999 International Microprocesses and Nanotechnology Conference). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMNC.1999.797471