Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope

Chan Kyeong Hyon, Seung Chul Choi, Sung Woo Hwang, Doyeol Ahn, Yong Kim, Eun Kyu Kim

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Nanometer scale mechanical processing of semi-insulating GaAs surface was performed using a cantilever oscillating atomic force microscope. Oscillating probe tips induce bond breaking of the GaAs surface and generate nano-meter size patterns. The size of the pattern is shown to be fully controlled by the amplitude and the frequency of the external modulation voltage to the piezo-scanner.

Original languageEnglish
Pages (from-to)7257-7259
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume38
Issue number12 B
StatePublished - 1999 Dec 1

Fingerprint

nanofabrication
manipulators
Microscopes
microscopes
Fabrication
oscillations
scanners
Modulation
modulation
probes
Electric potential
electric potential
Processing

Keywords

  • AFM
  • Cantilever oscillation
  • Nano-structure
  • Scanning probe lithography
  • Voltage modulation

Cite this

@article{e4e919530e554470b170bb631f4ee457,
title = "Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope",
abstract = "Nanometer scale mechanical processing of semi-insulating GaAs surface was performed using a cantilever oscillating atomic force microscope. Oscillating probe tips induce bond breaking of the GaAs surface and generate nano-meter size patterns. The size of the pattern is shown to be fully controlled by the amplitude and the frequency of the external modulation voltage to the piezo-scanner.",
keywords = "AFM, Cantilever oscillation, Nano-structure, Scanning probe lithography, Voltage modulation",
author = "Hyon, {Chan Kyeong} and Choi, {Seung Chul} and Hwang, {Sung Woo} and Doyeol Ahn and Yong Kim and Kim, {Eun Kyu}",
year = "1999",
month = "12",
day = "1",
language = "English",
volume = "38",
pages = "7257--7259",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers",
issn = "0021-4922",
number = "12 B",

}

Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope. / Hyon, Chan Kyeong; Choi, Seung Chul; Hwang, Sung Woo; Ahn, Doyeol; Kim, Yong; Kim, Eun Kyu.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 38, No. 12 B, 01.12.1999, p. 7257-7259.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope

AU - Hyon, Chan Kyeong

AU - Choi, Seung Chul

AU - Hwang, Sung Woo

AU - Ahn, Doyeol

AU - Kim, Yong

AU - Kim, Eun Kyu

PY - 1999/12/1

Y1 - 1999/12/1

N2 - Nanometer scale mechanical processing of semi-insulating GaAs surface was performed using a cantilever oscillating atomic force microscope. Oscillating probe tips induce bond breaking of the GaAs surface and generate nano-meter size patterns. The size of the pattern is shown to be fully controlled by the amplitude and the frequency of the external modulation voltage to the piezo-scanner.

AB - Nanometer scale mechanical processing of semi-insulating GaAs surface was performed using a cantilever oscillating atomic force microscope. Oscillating probe tips induce bond breaking of the GaAs surface and generate nano-meter size patterns. The size of the pattern is shown to be fully controlled by the amplitude and the frequency of the external modulation voltage to the piezo-scanner.

KW - AFM

KW - Cantilever oscillation

KW - Nano-structure

KW - Scanning probe lithography

KW - Voltage modulation

UR - http://www.scopus.com/inward/record.url?scp=0033315311&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0033315311

VL - 38

SP - 7257

EP - 7259

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

SN - 0021-4922

IS - 12 B

ER -