MoO3 thin film synthesis by chemical vapor transport of volatile MoO3(OH)2

Young Jung Lee, Chang Won Park, Dae Gun Kim, William T. Nichols, Sung Tag Oh, Young Do Kim

Research output: Contribution to journalArticlepeer-review

13 Scopus citations


Molybdenum oxide thin films with good adhesion and crystallinity were homogeneously deposited by the chemical vapor transport of MoO3(OH)2 and subsequent dehydration to the Mo oxide phase during hydrogen-reduction. This new deposition technique would be an effective deposition method for MoO3 thin films due to the simple, low-cost, large area deposition and eco-friendly process. The surface morphology dramatically changed by thermal annealing at different temperatures and a uniform ~1 μm thickness was obtained. The effect of the annealing temperature is discussed.

Original languageEnglish
Pages (from-to)52-55
Number of pages4
JournalJournal of Ceramic Processing Research
Issue number1
StatePublished - 2010 Apr 16


  • Chemical vapor transport
  • Heat-treatment
  • Hydrogen reduction
  • Molybdenum oxide

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