Molybdenum oxide thin films with good adhesion and crystallinity were homogeneously deposited by the chemical vapor transport of MoO3(OH)2 and subsequent dehydration to the Mo oxide phase during hydrogen-reduction. This new deposition technique would be an effective deposition method for MoO3 thin films due to the simple, low-cost, large area deposition and eco-friendly process. The surface morphology dramatically changed by thermal annealing at different temperatures and a uniform ~1 μm thickness was obtained. The effect of the annealing temperature is discussed.
|Number of pages||4|
|Journal||Journal of Ceramic Processing Research|
|Publication status||Published - 2010 Apr 16|
- Chemical vapor transport
- Hydrogen reduction
- Molybdenum oxide