Microstructure evolution of titanium nitride film during vacuum kinetic spraying

Fei Cao, Hyungkwon Park, Gyuyeol Bae, Jeeae Heo, Changhee Lee

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

Single crystal titanium nitride powder was used to fabricate titanium nitride films using a vacuum kinetic spray (VKS) process. Field emission scanning electron microscopy (FESEM) and transmission electron microscopy (FETEM) were used to investigate the microstructure of the as-fabricated films under different process conditions. Plastic deformation features (i.e., amorphization, rotated grain, slip bands, and distorted lattices in the transition structure) revealed an elastic-to-inelastic transition of titanium nitride particles at high strain rate and high pressure induced by hypervelocity impact, which was considered vital for grain refinement and film growth during the process.

Original languageEnglish
Pages (from-to)40-43
Number of pages4
JournalJournal of the American Ceramic Society
Volume96
Issue number1
DOIs
StatePublished - 2013 Jan 1

Fingerprint

Titanium nitride
Spraying
Vacuum
Microstructure
Kinetics
Amorphization
Grain refinement
Film growth
Field emission
Powders
Strain rate
Plastic deformation
Single crystals
Transmission electron microscopy
Scanning electron microscopy
titanium nitride

Cite this

Cao, Fei ; Park, Hyungkwon ; Bae, Gyuyeol ; Heo, Jeeae ; Lee, Changhee. / Microstructure evolution of titanium nitride film during vacuum kinetic spraying. In: Journal of the American Ceramic Society. 2013 ; Vol. 96, No. 1. pp. 40-43.
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Microstructure evolution of titanium nitride film during vacuum kinetic spraying. / Cao, Fei; Park, Hyungkwon; Bae, Gyuyeol; Heo, Jeeae; Lee, Changhee.

In: Journal of the American Ceramic Society, Vol. 96, No. 1, 01.01.2013, p. 40-43.

Research output: Contribution to journalArticle

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