Method for measurement of transferred power to plasma in inductive discharges

Hye Ju Hwang, Young Cheol Kim, ChinWook Chung

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

A method for measuring a transferred power to plasma is proposed in an inductively coupled plasma. Antenna currents are monitored when the plasma is turned on at a certain input power. The transferred power can be obtained by subtraction of the power at the same current when the plasma is turned off without inert gas, to the input power. This method is compared to the conventional method against various input powers and it is in good agreement. The circuit analysis of an impedance matching network is also discussed in this work.

Original languageEnglish
Pages (from-to)9-12
Number of pages4
JournalThin Solid Films
Volume547
DOIs
StatePublished - 2013 Nov 29

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Plasmas
Noble Gases
Inductively coupled plasma
Electric network analysis
Inert gases
impedance matching
subtraction
Antennas
rare gases
antennas

Keywords

  • Dissipated power in system
  • Inductively coupled plasma
  • Power transfer efficiency

Cite this

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abstract = "A method for measuring a transferred power to plasma is proposed in an inductively coupled plasma. Antenna currents are monitored when the plasma is turned on at a certain input power. The transferred power can be obtained by subtraction of the power at the same current when the plasma is turned off without inert gas, to the input power. This method is compared to the conventional method against various input powers and it is in good agreement. The circuit analysis of an impedance matching network is also discussed in this work.",
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Method for measurement of transferred power to plasma in inductive discharges. / Hwang, Hye Ju; Kim, Young Cheol; Chung, ChinWook.

In: Thin Solid Films, Vol. 547, 29.11.2013, p. 9-12.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Method for measurement of transferred power to plasma in inductive discharges

AU - Hwang, Hye Ju

AU - Kim, Young Cheol

AU - Chung, ChinWook

PY - 2013/11/29

Y1 - 2013/11/29

N2 - A method for measuring a transferred power to plasma is proposed in an inductively coupled plasma. Antenna currents are monitored when the plasma is turned on at a certain input power. The transferred power can be obtained by subtraction of the power at the same current when the plasma is turned off without inert gas, to the input power. This method is compared to the conventional method against various input powers and it is in good agreement. The circuit analysis of an impedance matching network is also discussed in this work.

AB - A method for measuring a transferred power to plasma is proposed in an inductively coupled plasma. Antenna currents are monitored when the plasma is turned on at a certain input power. The transferred power can be obtained by subtraction of the power at the same current when the plasma is turned off without inert gas, to the input power. This method is compared to the conventional method against various input powers and it is in good agreement. The circuit analysis of an impedance matching network is also discussed in this work.

KW - Dissipated power in system

KW - Inductively coupled plasma

KW - Power transfer efficiency

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