IZO/Al/GZO multilayer films to replace ITO films

Chongmu Lee, R. P. Dwivedi, Wangwoo Lee, Chanseok Hong, Wan In Lee, Hyoun Woo Kim

Research output: Contribution to journalArticle

34 Scopus citations


Multilayer transparent conducting oxide (TCO) film structures have been designed and fabricated to achieve both high conductivity and high transmittance. In this article we report a buffering method and introduction of an aluminum (Al) interlayer to enhance the electrical conductivity of the IZO/Al/GZO/ZnO multilayer film on glass. Hall measurement results show that this multilayer film has a remarkable increase in mobility compared to those without using an Al interlayer. The surface morphology shows a decrease in surface roughness as the Al layer thickness increases. We have shown that the use of a thin Al interlayer enhances the electrical conductivity without sacrificing its optical transmittance much. By optimizing the thickness of the Al layer, the lowest resistivity of 2.2 10 -4 ω cm and an average transmittance higher than 75% in a range from 400 to 800 nm have been achieved. These properties are acceptable for future TCO applications.

Original languageEnglish
Pages (from-to)981-985
Number of pages5
JournalJournal of Materials Science: Materials in Electronics
Issue number10
StatePublished - 2008 Oct 1

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