Investigation of plasma diagnostics using a dual frequency harmonic technique

Dong Hwan Kim, Young Do Kim, Sung Won Cho, Yu Sin Kim, ChinWook Chung

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Plasma diagnostic methods using harmonic currents analysis of electrostatic probes were experimentally investigated to understand the differences in their measurement of the plasma parameters. When dual frequency voltage (ω1,ω2) was applied to a probe, various harmonic currents (ω1, 2ω1,ω2, 2ω2,ω2±ω1,ω2±2ω1) were generated due to the non-linearity of the probe sheath. The electron temperature can be obtained from the ratio of the two harmonics of the probe currents. According to the combinations of the two harmonics, the sensitivities in the measurement of the electron temperature differed, and this results in a difference of the electron temperature. From experiments and simulation, it is shown that this difference is caused by the systematic and random noise.

Original languageEnglish
Article number093302
JournalJournal of Applied Physics
Volume116
Issue number9
DOIs
StatePublished - 2014 Sep 7

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plasma diagnostics
harmonics
electron energy
probes
electrostatic probes
random noise
sheaths
nonlinearity
sensitivity
electric potential
simulation

Cite this

Kim, Dong Hwan ; Kim, Young Do ; Cho, Sung Won ; Kim, Yu Sin ; Chung, ChinWook. / Investigation of plasma diagnostics using a dual frequency harmonic technique. In: Journal of Applied Physics. 2014 ; Vol. 116, No. 9.
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Investigation of plasma diagnostics using a dual frequency harmonic technique. / Kim, Dong Hwan; Kim, Young Do; Cho, Sung Won; Kim, Yu Sin; Chung, ChinWook.

In: Journal of Applied Physics, Vol. 116, No. 9, 093302, 07.09.2014.

Research output: Contribution to journalArticle

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