In-situ hydrogen and oxygen plasma purification of carbon nanotubes

Mihyun Kang, Yangdo Kim, Hyeongtag Jeon

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Bulk bundles, which are obtained after purification of carbon soot containing nanotubes (CNTs), are commonly used as electron emitters. However, CNTs grown by chemical vapor deposition (CVD) at low temperature using a nickel (Ni) catalyst still contain impurities, such as amorphous carbon and catalytic metal particles, and need to be purified. We grew CNTs on silicon substrates with native oxides by using a Ni catalyst and plasma-enhanced CVD at 600 °C with a mixture of CH4, NH3, and H2 gases. CNTs were observed to have multi-wall structures with large inside hollow cores containing Ni. CNTs with a typical dimension of a few tens of nm in diameter and several (m in length were observed. In-situ hydrogen plasma treatment successfully removed the residual carbonaceous particles and metallic impurities without significant structural damage to the individual CNTs. This study demonstrated a simple and efficient in-situ plasma purification process for CNTs grown by using plasma-enhanced CVD.

Original languageEnglish
Pages (from-to)1072-1075
Number of pages4
JournalJournal of the Korean Physical Society
Volume39
Issue number6
StatePublished - 2001 Dec 1

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oxygen plasma
hydrogen plasma
purification
nanotubes
carbon nanotubes
vapor deposition
nickel
catalysts
impurities
carbon
metal particles
soot
bundles
hollow
emitters
damage
oxides
silicon
gases
electrons

Cite this

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title = "In-situ hydrogen and oxygen plasma purification of carbon nanotubes",
abstract = "Bulk bundles, which are obtained after purification of carbon soot containing nanotubes (CNTs), are commonly used as electron emitters. However, CNTs grown by chemical vapor deposition (CVD) at low temperature using a nickel (Ni) catalyst still contain impurities, such as amorphous carbon and catalytic metal particles, and need to be purified. We grew CNTs on silicon substrates with native oxides by using a Ni catalyst and plasma-enhanced CVD at 600 °C with a mixture of CH4, NH3, and H2 gases. CNTs were observed to have multi-wall structures with large inside hollow cores containing Ni. CNTs with a typical dimension of a few tens of nm in diameter and several (m in length were observed. In-situ hydrogen plasma treatment successfully removed the residual carbonaceous particles and metallic impurities without significant structural damage to the individual CNTs. This study demonstrated a simple and efficient in-situ plasma purification process for CNTs grown by using plasma-enhanced CVD.",
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In-situ hydrogen and oxygen plasma purification of carbon nanotubes. / Kang, Mihyun; Kim, Yangdo; Jeon, Hyeongtag.

In: Journal of the Korean Physical Society, Vol. 39, No. 6, 01.12.2001, p. 1072-1075.

Research output: Contribution to journalArticle

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AU - Kang, Mihyun

AU - Kim, Yangdo

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