Fingerprint
Dive into the research topics of 'Growth of γ-Al<sub>2</sub>O<sub>3</sub> thin films on silicon by low pressure metal-organic chemical vapour deposition'. Together they form a unique fingerprint.
Chemical Compounds
Organic Chemicals
Silicon
Chemical vapor deposition
Aluminum oxide
Thin films
Metals
Auger electron spectroscopy
Interface states
Capacitance measurement
Stoichiometry
Aluminum Oxide
X ray diffraction analysis
Voltage measurement
Nitrous Oxide
Aluminum
Energy gap
Pyrolysis
Semiconductor materials
Hot Temperature
Temperature
Engineering & Materials Science
Organic chemicals
Chemical vapor deposition
Aluminum oxide
Thin films
Silicon
Metals
Auger electron spectroscopy
Interface states
Capacitance measurement
Stoichiometry
Sapphire
X ray diffraction analysis
Voltage measurement
Energy gap
Pyrolysis
Semiconductor materials
Oxides
Aluminum
Hot Temperature
Temperature
Physics & Astronomy
metalorganic chemical vapor deposition
low pressure
silicon
thin films
nitrous oxides
MIS (semiconductors)
pyrolysis
Auger spectroscopy
electron spectroscopy
stoichiometry
electrical measurement
sapphire
capacitance
insulators
aluminum
room temperature
diffraction
x rays