Formation of Cu or Cu 2O nanoparticles embedded in a polyimide film for nanofloating gate memory

Dong Joo Choi, Key One Ahn, Eun Kyu Kim, Young Ho Kim

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Cu and Cu 2O nanoparticles were fabricated in polyimide by curing the stacked polyamic acid/Cu/polyamic acid on Si wafer and post heat treatment. Nanoparticle distribution in polyimide (a monolayer of vertically aligned nanoparticles or the randomly dispersed nanoparticles) can be controlled by changing the reactivity of Cu with PAA and curing atmosphere. About 6-7 nm sized Cu or Cu 2O nanoparticles were observed in the polyimide film. The capacitance-voltage curves were measured with Al/particles in polyimide/p-Si(100) specimens at 300 K, and the capacitance hystereses were observed at different sweep voltage ranges, which indicates that Cu 2O or Cu nanoparticles can be utilized in next generation flash memories.

Original languageEnglish
Pages (from-to)11100-11103
Number of pages4
JournalJournal of Nanoscience and Nanotechnology
Volume11
Issue number12
DOIs
StatePublished - 2011 Dec 1

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Nanoparticles
Atmosphere
Hot Temperature
polyamic acid

Keywords

  • Cu O nanoparticles
  • Cu nanoparticles
  • Curing
  • Nano-floating gate memory
  • Polyimide

Cite this

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abstract = "Cu and Cu 2O nanoparticles were fabricated in polyimide by curing the stacked polyamic acid/Cu/polyamic acid on Si wafer and post heat treatment. Nanoparticle distribution in polyimide (a monolayer of vertically aligned nanoparticles or the randomly dispersed nanoparticles) can be controlled by changing the reactivity of Cu with PAA and curing atmosphere. About 6-7 nm sized Cu or Cu 2O nanoparticles were observed in the polyimide film. The capacitance-voltage curves were measured with Al/particles in polyimide/p-Si(100) specimens at 300 K, and the capacitance hystereses were observed at different sweep voltage ranges, which indicates that Cu 2O or Cu nanoparticles can be utilized in next generation flash memories.",
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Formation of Cu or Cu 2O nanoparticles embedded in a polyimide film for nanofloating gate memory. / Choi, Dong Joo; Ahn, Key One; Kim, Eun Kyu; Kim, Young Ho.

In: Journal of Nanoscience and Nanotechnology, Vol. 11, No. 12, 01.12.2011, p. 11100-11103.

Research output: Contribution to journalArticle

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AU - Choi, Dong Joo

AU - Ahn, Key One

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AU - Kim, Young Ho

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