Finite element analysis of CMUTs with pressurized cavities

Nikhil Apte, Kwan Kyu Park, Butrus T. Khuri-Yakub

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)

Abstract

We propose using CMUTs with pressurized cavities in environments with extreme pressure variations. By controlling the pressure inside the cavity, the pressure differential across the CMUT plate can be kept low, ensuring a stable operating point and preventing mechanical failure. In such CMUTs, a squeeze film is formed between the plate and the substrate, which provides additional damping as well as stiffening. The damping from the squeeze film helps increase the bandwidth of the CMUT. We present a new method for performing a finite element analysis for such structures using ANSYS. We fabricated a variety of vented CMUTs in the frequency range of ∼100-200 kHz, which exhibited a quality factor of 25-30 in air at 1 atm pressure. Our finite element model successfully predicts the center frequency and quality factor for these devices.

Original languageEnglish
Title of host publication2012 IEEE International Ultrasonics Symposium, IUS 2012
Pages979-982
Number of pages4
DOIs
StatePublished - 2012 Dec 1
Event2012 IEEE International Ultrasonics Symposium, IUS 2012 - Dresden, Germany
Duration: 2012 Oct 72012 Oct 10

Other

Other2012 IEEE International Ultrasonics Symposium, IUS 2012
CountryGermany
CityDresden
Period12/10/712/10/10

Fingerprint

squeeze films
cavities
Q factors
damping
differential pressure
stiffening
frequency ranges
bandwidth
air

Keywords

  • CMUT
  • FEA
  • squeeze-film damping
  • varying pressure

Cite this

Apte, N., Park, K. K., & Khuri-Yakub, B. T. (2012). Finite element analysis of CMUTs with pressurized cavities. In 2012 IEEE International Ultrasonics Symposium, IUS 2012 (pp. 979-982). [6562505] https://doi.org/10.1109/ULTSYM.2012.0245
Apte, Nikhil ; Park, Kwan Kyu ; Khuri-Yakub, Butrus T. / Finite element analysis of CMUTs with pressurized cavities. 2012 IEEE International Ultrasonics Symposium, IUS 2012. 2012. pp. 979-982
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Apte, N, Park, KK & Khuri-Yakub, BT 2012, Finite element analysis of CMUTs with pressurized cavities. in 2012 IEEE International Ultrasonics Symposium, IUS 2012., 6562505, pp. 979-982, 2012 IEEE International Ultrasonics Symposium, IUS 2012, Dresden, Germany, 12/10/7. https://doi.org/10.1109/ULTSYM.2012.0245

Finite element analysis of CMUTs with pressurized cavities. / Apte, Nikhil; Park, Kwan Kyu; Khuri-Yakub, Butrus T.

2012 IEEE International Ultrasonics Symposium, IUS 2012. 2012. p. 979-982 6562505.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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AB - We propose using CMUTs with pressurized cavities in environments with extreme pressure variations. By controlling the pressure inside the cavity, the pressure differential across the CMUT plate can be kept low, ensuring a stable operating point and preventing mechanical failure. In such CMUTs, a squeeze film is formed between the plate and the substrate, which provides additional damping as well as stiffening. The damping from the squeeze film helps increase the bandwidth of the CMUT. We present a new method for performing a finite element analysis for such structures using ANSYS. We fabricated a variety of vented CMUTs in the frequency range of ∼100-200 kHz, which exhibited a quality factor of 25-30 in air at 1 atm pressure. Our finite element model successfully predicts the center frequency and quality factor for these devices.

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Apte N, Park KK, Khuri-Yakub BT. Finite element analysis of CMUTs with pressurized cavities. In 2012 IEEE International Ultrasonics Symposium, IUS 2012. 2012. p. 979-982. 6562505 https://doi.org/10.1109/ULTSYM.2012.0245