Fabrication of ball-shaped atomic force microscope tips by ion-beam-induced deposition of platinum on multiwall carbon nanotubes

Yung Ho Kahng, Jinho Choi, Kwanghoon Jeong, Byong Chon Park, Dal Hyun Kim, Joon Lyou, Jae Joon Lee, Haiwon Lee, Takhee Lee, Sang Jung Ahn

Research output: Contribution to journalArticle

1 Scopus citations

Abstract

Ball-shaped atomic force microscope (AFM) tips (ball tips) are useful in AFM metrology, particularly in critical dimension AFM metrology and in micro-tribology. However, a systematic fabrication method for nano-scale ball tips has not been reported. We report that nano-scale ball tips can be fabricated by ion-beam-induced deposition (IBID) of Pt at the free end of multiwall carbon nanotubes that are attached to AFM tips. Scanning electron microscopy and transmission electron microscopy analyses were done on the Pt ball tips produced by IBID in this manner, using ranges of Ga ion beam conditions. The Pt ball tips produced consisted of aggregated Pt nano-particles and were found to be strong enough for AFM imaging.

Original languageEnglish
Pages (from-to)82-88
Number of pages7
JournalUltramicroscopy
Volume110
Issue number1
DOIs
StatePublished - 2009 Jan 1

Keywords

  • Atomic force microscopy
  • Carbon nanotube tip
  • Focused ion beam

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    Kahng, Y. H., Choi, J., Jeong, K., Chon Park, B., Kim, D. H., Lyou, J., Lee, J. J., Lee, H., Lee, T., & Jung Ahn, S. (2009). Fabrication of ball-shaped atomic force microscope tips by ion-beam-induced deposition of platinum on multiwall carbon nanotubes. Ultramicroscopy, 110(1), 82-88. https://doi.org/10.1016/j.ultramic.2009.09.011