Fabrication and characteristics of TiO2 nanotubes using atomic layer chemical vapor deposition (ALCVD)

Dongkyu Cha, Bongki Lee, Moon J. Kim, Jiyoung Kim, Sanghee Won, Hyun Jung Shin, Jaegab Lee, Myung Mo Sung

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

In this study, we report fabrication of TiO2 nanotubes using atomic layer chemical vapor deposition (ALCVD). In addition, electrical properties of single TiO2 nanotube devices are presented. Comparative study on TiO2 nanotube devices is discussed. The electrical test devices are fabricated by a novel patterning route combining conventional photolithography and Focused Ion Beam (FIB) techniques as well as direct FIB patterning. Additionally, electrical characteristics of TiO2 nanotubes are measured by direct probing in TEM. TiO2 nanotube devices show linear I-V characteristics depending on ambient and technique of measurement. copyright The Electrochemical Society.

Original languageEnglish
Title of host publicationECS Transactions - 2nd Symposium on Atomic Layer Deposition Applications
Pages227-232
Number of pages6
Edition15
DOIs
StatePublished - 2007 Dec 1
Event2nd Symposium on Atomic Layer Deposition Applications - 210th ECS Meeting - Cancun, Mexico
Duration: 2006 Oct 292006 Nov 1

Publication series

NameECS Transactions
Number15
Volume3
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

Other2nd Symposium on Atomic Layer Deposition Applications - 210th ECS Meeting
CountryMexico
CityCancun
Period06/10/2906/11/1

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    Cha, D., Lee, B., Kim, M. J., Kim, J., Won, S., Shin, H. J., Lee, J., & Sung, M. M. (2007). Fabrication and characteristics of TiO2 nanotubes using atomic layer chemical vapor deposition (ALCVD). In ECS Transactions - 2nd Symposium on Atomic Layer Deposition Applications (15 ed., pp. 227-232). (ECS Transactions; Vol. 3, No. 15). https://doi.org/10.1149/1.2721491