Effects of etching time and thickness on the performance of the microstrip line resonator of YBa2Cu3Ox thin films

Jongwan Choi, Seungbum Hong, Byung Hyuk Jun, Tae Hyun Sung, Yonggi Park, Kwangsoo No

Research output: Contribution to journalArticle

Abstract

Microstrip transmission lines in the form of an open-ended half-wavelength resonator were fabricated by depositing YBa2Cu3Ox thin films on MgO substrates using the pulsed laser deposition method. All YBa2Cu3Ox thin films had c-axis orientation. The effects of etching time and thickness on the performance of the microstrip line resonator were investigated. As the etching time increased, the loaded quality factor decreased and the surface resistance increased due to the undercut and the increase in roughness of the etched surface. The quality factor and the surface resistance showed a strong dependence on the film thickness. The superconducting properties and the microwave characteristics correlated well with the microstructure.

Original languageEnglish
Pages (from-to)1941-1944
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume38
Issue number4 A
DOIs
StatePublished - 1999 Jan 1

Keywords

  • Etching
  • Micro-stripline
  • Resonator
  • Superconductor
  • Thickness
  • YBCO

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