Effect of crystallinity of ceria particles on the PETEOS removal rate in chemical mechanical polishing for shallow trench isolation

J. Y. Kim, S. K. Kim, Ungyu Paik, T. Katoh, Jea Gun Park

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

In this study, the plasma-enhanced tetraethylorthosilicate (PETEOS) removal rate was investigated as a function of CeO2 crystallinity. Cerium-oxide powders were synthesized from different soluble salts by the solid-state displacement reaction and the wet chemical precipitation methods. The slurry analysis showed that with a weight fraction of 1 % of an anionic surfactant added to improve the dispersion stability by using the two methods had similar surface potentials and rheological behaviors. However, differences in the crystallite sizes of the ceria particles were found after X-ray diffraction analysis. The CeO2 powders calcined at 400 °C showed higher crystallinity than and different PETEOS removal rates from those for powders obtained by using a wet chemical precipitation method.

Original languageEnglish
Pages (from-to)413-416
Number of pages4
JournalJournal of the Korean Physical Society
Volume41
Issue number4
StatePublished - 2002 Oct 1

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polishing
crystallinity
isolation
cerium oxides
surfactants
salts
solid state
diffraction
x rays

Keywords

  • CMP
  • Ceria
  • Crystallinity
  • Removal rate
  • STI

Cite this

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abstract = "In this study, the plasma-enhanced tetraethylorthosilicate (PETEOS) removal rate was investigated as a function of CeO2 crystallinity. Cerium-oxide powders were synthesized from different soluble salts by the solid-state displacement reaction and the wet chemical precipitation methods. The slurry analysis showed that with a weight fraction of 1 {\%} of an anionic surfactant added to improve the dispersion stability by using the two methods had similar surface potentials and rheological behaviors. However, differences in the crystallite sizes of the ceria particles were found after X-ray diffraction analysis. The CeO2 powders calcined at 400 °C showed higher crystallinity than and different PETEOS removal rates from those for powders obtained by using a wet chemical precipitation method.",
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Effect of crystallinity of ceria particles on the PETEOS removal rate in chemical mechanical polishing for shallow trench isolation. / Kim, J. Y.; Kim, S. K.; Paik, Ungyu; Katoh, T.; Park, Jea Gun.

In: Journal of the Korean Physical Society, Vol. 41, No. 4, 01.10.2002, p. 413-416.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Effect of crystallinity of ceria particles on the PETEOS removal rate in chemical mechanical polishing for shallow trench isolation

AU - Kim, J. Y.

AU - Kim, S. K.

AU - Paik, Ungyu

AU - Katoh, T.

AU - Park, Jea Gun

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