Effect of calcination process on synthesis of ceria particles, and its influence on shallow trench isolation chemical mechanical planarization performance

Dae Hyeong Kim, Hyun Goo Kang, Sang Kyun Kim, Ungyu Paik, Jea Gun Park

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The effect of the calcination process for cerium carbonate, a precursor of ceria, on the degree of synthesis and colloidal properties of ceria particles in aqueous media, which greatly influence shallow trench isolation (STI) chemical mechanical planarization (CMP) performance, was investigated. A two-step calcination process, consisting of decarbonation and crystal growth, resulted in a higher degree of synthesis for the same crystal size, a narrower particle size distribution, and better dispersion of the ceria particles, than conventional one-step calcination. These properties enhanced certain aspects of STI CMP performance, leading to a higher oxide removal rate, a better selectivity between oxide and nitride, and fewer defects, including remaining particles.

Original languageEnglish
Pages (from-to)4893-4897
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume45
Issue number6 A
DOIs
StatePublished - 2006 Jun 28

Fingerprint

Chemical mechanical polishing
Cerium compounds
Calcination
roasting
isolation
synthesis
decarbonation
Oxides
oxides
Cerium
cerium
particle size distribution
Crystal growth
Nitrides
Particle size analysis
nitrides
crystal growth
Carbonates
carbonates
selectivity

Keywords

  • Agglomeration
  • Calcination
  • Ceria
  • Density
  • Particle size distribution
  • Slurry
  • STI CMP

Cite this

@article{cf629d3acad74a83be993a4b263e03ea,
title = "Effect of calcination process on synthesis of ceria particles, and its influence on shallow trench isolation chemical mechanical planarization performance",
abstract = "The effect of the calcination process for cerium carbonate, a precursor of ceria, on the degree of synthesis and colloidal properties of ceria particles in aqueous media, which greatly influence shallow trench isolation (STI) chemical mechanical planarization (CMP) performance, was investigated. A two-step calcination process, consisting of decarbonation and crystal growth, resulted in a higher degree of synthesis for the same crystal size, a narrower particle size distribution, and better dispersion of the ceria particles, than conventional one-step calcination. These properties enhanced certain aspects of STI CMP performance, leading to a higher oxide removal rate, a better selectivity between oxide and nitride, and fewer defects, including remaining particles.",
keywords = "Agglomeration, Calcination, Ceria, Density, Particle size distribution, Slurry, STI CMP",
author = "Kim, {Dae Hyeong} and Kang, {Hyun Goo} and Kim, {Sang Kyun} and Ungyu Paik and Park, {Jea Gun}",
year = "2006",
month = "6",
day = "28",
doi = "10.1143/JJAP.45.4893",
language = "English",
volume = "45",
pages = "4893--4897",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers",
issn = "0021-4922",
number = "6 A",

}

TY - JOUR

T1 - Effect of calcination process on synthesis of ceria particles, and its influence on shallow trench isolation chemical mechanical planarization performance

AU - Kim, Dae Hyeong

AU - Kang, Hyun Goo

AU - Kim, Sang Kyun

AU - Paik, Ungyu

AU - Park, Jea Gun

PY - 2006/6/28

Y1 - 2006/6/28

N2 - The effect of the calcination process for cerium carbonate, a precursor of ceria, on the degree of synthesis and colloidal properties of ceria particles in aqueous media, which greatly influence shallow trench isolation (STI) chemical mechanical planarization (CMP) performance, was investigated. A two-step calcination process, consisting of decarbonation and crystal growth, resulted in a higher degree of synthesis for the same crystal size, a narrower particle size distribution, and better dispersion of the ceria particles, than conventional one-step calcination. These properties enhanced certain aspects of STI CMP performance, leading to a higher oxide removal rate, a better selectivity between oxide and nitride, and fewer defects, including remaining particles.

AB - The effect of the calcination process for cerium carbonate, a precursor of ceria, on the degree of synthesis and colloidal properties of ceria particles in aqueous media, which greatly influence shallow trench isolation (STI) chemical mechanical planarization (CMP) performance, was investigated. A two-step calcination process, consisting of decarbonation and crystal growth, resulted in a higher degree of synthesis for the same crystal size, a narrower particle size distribution, and better dispersion of the ceria particles, than conventional one-step calcination. These properties enhanced certain aspects of STI CMP performance, leading to a higher oxide removal rate, a better selectivity between oxide and nitride, and fewer defects, including remaining particles.

KW - Agglomeration

KW - Calcination

KW - Ceria

KW - Density

KW - Particle size distribution

KW - Slurry

KW - STI CMP

UR - http://www.scopus.com/inward/record.url?scp=33745238060&partnerID=8YFLogxK

U2 - 10.1143/JJAP.45.4893

DO - 10.1143/JJAP.45.4893

M3 - Article

AN - SCOPUS:33745238060

VL - 45

SP - 4893

EP - 4897

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

SN - 0021-4922

IS - 6 A

ER -