Determination of the optical functions of various liquids by rotating compensator multichannel spectroscopic ellipsometry

Yoon Bang Kyung, Seunghyun Lee, Hyekeun Oh, Ilsin An, Haiwon Lee

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Abstract

Rotating compensator multichannel spectroscopic ellipsometry has been employed to determine the optical functions of various liquids used in chemistry. We attempted three different measurement configurations: (1) air-liquid interface, (2) prism-liquid interface, and (3) liquid-sample interface. In prism-liquid interface, we found that the prism surface had roughness and it should be considered in analysis for accurate results. In liquid-sample interface, we had much higher reflection, better sensitivity, and less limitation compared to the other two configurations when crystalline silicon was used as reference sample. We discuss the merit of each configuration and present the optical functions of various liquids. Also we demonstrate Bruggeman effective medium theory to determine the optical properties of mixed liquid.

Original languageEnglish
Pages (from-to)947-951
Number of pages5
JournalBulletin of the Korean Chemical Society
Volume26
Issue number6
DOIs
Publication statusPublished - 2005 Jun 20

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Keywords

  • Liquid refractive index
  • Spectroscopic ellipsometry

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