Deposition and characterization of (Ba, Sr)RuO3 oxide electrode using TMHD-based single cocktail source

Hyun Chul Kim, Kyung Il Hong, Young Bae Kim, Duck Kyun Choi

Research output: Contribution to journalArticle

Abstract

(Ba, Sr)RuO3 has been paid an attention as a promising electrode for (Ba, Sr)TiO3 dielectric material due to its similarity in structure and chemical composition with BST. In this study, (Ba, Sr)RuO3 conductive oxide film was deposited on a 4 inch p-type Si wafer by metal organic chemical vapor deposition (MOCVD) using single cocktail source for the practical device application. Ba(TMHD)2, Sr(TMHD)2, Ru(TMHD)3 precursors and solvent [1-EtylePiPerdine (C7H15N)] as starting materials were mixed together for single cocktail source. A liquid delivery system (LDS) and a vaporization cell were utilized for the delivery and vaporization of single cocktail source, respectively. The source feeding rate was controlled by a liquid mass flow controller (LMFC). Deposition parameters, such as the oxygen flow and the source flow rate, were sensitive to phase formation, resistivity and the composition ratio of (Ba, Sr)RuO3 films. Highly (110)-textured (Ba, Sr)RuO3 film was obtained when the Ar/O2 ratio was 200/140 sccm at a source flow rate of 0.05 sccm. The process window of stoichiometric composition of BSR film was observed with varying the source flow rate from 0.05 sccm to 0.1 sccm.

Original languageEnglish
Pages (from-to)8-12
Number of pages5
JournalJournal of Rare Earths
Volume22
Issue numberSUPPL. 2
StatePublished - 2004 Aug

Fingerprint

Oxides
electrode
Flow rate
oxide
Vaporization
Electrodes
Chemical analysis
vaporization
Organic Chemicals
Conductive films
Liquids
Oxide films
Chemical vapor deposition
Metals
liquid
Oxygen
Controllers
electrical resistivity
chemical composition
oxygen

Keywords

  • (Ba, Sr)RuO
  • (Ba, Sr)TiO
  • Liquid delivery system (LDS)
  • MOCVD
  • Nozzle type injector

Cite this

Kim, Hyun Chul ; Hong, Kyung Il ; Kim, Young Bae ; Choi, Duck Kyun. / Deposition and characterization of (Ba, Sr)RuO3 oxide electrode using TMHD-based single cocktail source. In: Journal of Rare Earths. 2004 ; Vol. 22, No. SUPPL. 2. pp. 8-12.
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Deposition and characterization of (Ba, Sr)RuO3 oxide electrode using TMHD-based single cocktail source. / Kim, Hyun Chul; Hong, Kyung Il; Kim, Young Bae; Choi, Duck Kyun.

In: Journal of Rare Earths, Vol. 22, No. SUPPL. 2, 08.2004, p. 8-12.

Research output: Contribution to journalArticle

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AU - Hong, Kyung Il

AU - Kim, Young Bae

AU - Choi, Duck Kyun

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