Analysis of electron temperature in DC Ar/SF6 plasma using cylindrical and planar probes

Jin Woo Kim, Soon Gook Cho, Min Keun Bae, Hyung Jin Kim, Tae Hun Chung, Kyu-Sun Chung

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Abstract

Electronegative plasmas are generated by adding SF6 gas to a background argon (Ar) DC plasma with parameters of n0 = 1 × 1010 cm3 and Te = 2 eV. The heating current of the thoriated filament was in the range of 20.5-21.5 A and the plasmas were generated under a discharge condition of 100 V/0.4 A. The amount of negative ions was controlled by adjusting the ratio of flow rate of SF6 = 0-10% to that of Ar. Plasma parameters were measured using cylindrical and planar electric probes. The behavior of electrons, which means the change in a parameter due to negative ion production, is characterized by measuring the floating and plasma potentials, and electron temperature. Electron temperature seems to increase and the potentials decrease with SF6 flow rate.

Original languageEnglish
Article number11NC03
JournalJapanese Journal of Applied Physics
Volume52
Issue number11 PART 2
DOIs
StatePublished - 2013 Nov 1

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Electron temperature
argon plasma
Argon
direct current
electron energy
Plasmas
negative ions
probes
flow velocity
plasma potentials
Negative ions
floating
Flow rate
filaments
adjusting
argon
heating
gases
electrons
Heating

Cite this

Kim, Jin Woo ; Cho, Soon Gook ; Bae, Min Keun ; Kim, Hyung Jin ; Chung, Tae Hun ; Chung, Kyu-Sun. / Analysis of electron temperature in DC Ar/SF6 plasma using cylindrical and planar probes. In: Japanese Journal of Applied Physics. 2013 ; Vol. 52, No. 11 PART 2.
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Analysis of electron temperature in DC Ar/SF6 plasma using cylindrical and planar probes. / Kim, Jin Woo; Cho, Soon Gook; Bae, Min Keun; Kim, Hyung Jin; Chung, Tae Hun; Chung, Kyu-Sun.

In: Japanese Journal of Applied Physics, Vol. 52, No. 11 PART 2, 11NC03, 01.11.2013.

Research output: Contribution to journalArticle

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AU - Cho, Soon Gook

AU - Bae, Min Keun

AU - Kim, Hyung Jin

AU - Chung, Tae Hun

AU - Chung, Kyu-Sun

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AB - Electronegative plasmas are generated by adding SF6 gas to a background argon (Ar) DC plasma with parameters of n0 = 1 × 1010 cm3 and Te = 2 eV. The heating current of the thoriated filament was in the range of 20.5-21.5 A and the plasmas were generated under a discharge condition of 100 V/0.4 A. The amount of negative ions was controlled by adjusting the ratio of flow rate of SF6 = 0-10% to that of Ar. Plasma parameters were measured using cylindrical and planar electric probes. The behavior of electrons, which means the change in a parameter due to negative ion production, is characterized by measuring the floating and plasma potentials, and electron temperature. Electron temperature seems to increase and the potentials decrease with SF6 flow rate.

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