An 8-channel CMUT chemical sensor array on a single chip

Quintin Stedman, Kwan Kyu Park, Butrus T. Khuri-Yakub

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations

Abstract

CMUTs make very sensitive gravimetric chemical sensors in air. Selectivity can be improved by using arrays of these sensors with different functionalization coatings. However, operating multiple sensor on the same chip can be challenging because of sensor frequency locking and greater difficulty of functionalization. In prior work, or only two or three sensors have been used at once on the same chip. Here, we present results showing the simultaneous operation of 8 CMUT chemical sensors on a single chip, and demonstrate the ability of the sensor array to recognize chemicals in air.

Original languageEnglish
Title of host publication2017 IEEE International Ultrasonics Symposium, IUS 2017
PublisherIEEE Computer Society
ISBN (Electronic)9781538633830
DOIs
StatePublished - 2017 Oct 31
Event2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
Duration: 2017 Sep 62017 Sep 9

Other

Other2017 IEEE International Ultrasonics Symposium, IUS 2017
CountryUnited States
CityWashington
Period17/09/617/09/9

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    Stedman, Q., Park, K. K., & Khuri-Yakub, B. T. (2017). An 8-channel CMUT chemical sensor array on a single chip. In 2017 IEEE International Ultrasonics Symposium, IUS 2017 [8092252] IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2017.8092252