CMUTs make very sensitive gravimetric chemical sensors in air. Selectivity can be improved by using arrays of these sensors with different functionalization coatings. However, operating multiple sensor on the same chip can be challenging because of sensor frequency locking and greater difficulty of functionalization. In prior work, or only two or three sensors have been used at once on the same chip. Here, we present results showing the simultaneous operation of 8 CMUT chemical sensors on a single chip, and demonstrate the ability of the sensor array to recognize chemicals in air.
|Title of host publication||2017 IEEE International Ultrasonics Symposium, IUS 2017|
|Publisher||IEEE Computer Society|
|State||Published - 2017 Oct 31|
|Event||2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States|
Duration: 2017 Sep 6 → 2017 Sep 9
|Other||2017 IEEE International Ultrasonics Symposium, IUS 2017|
|Period||17/09/6 → 17/09/9|