A Bragg reflector type FBAR using AlN piezoelectric with quarter wavelength thickness has been fabricated, where the Bragg reflector was composed of W-SiO2 pairs. By numerical simulation, considering actual acoustic losses of each layer, an analysis of the frequency response of the resonator has been made and this could be explained using an equivalent circuit with parasitic elements. The Effective electromechanical coupling constant (K2eff) and the Quality factor (Qs), figures of merit of the resonator, were about 1.1% and 307, respectively.
|Number of pages||4|
|Journal||Journal of Ceramic Processing Research|
|Publication status||Published - 2002 Dec 1|
- Bragg reflector