Acceleration sensitivity in beam-type electrostatic microresonators

Manu Agarwal, Kwan K. Park, Saurabh A. Chandorkar, Rob N. Candler, Bongsang Kim, Matthew A. Hopcroft, Renata Melamud, Thomas W. Kenny, Boris Murmann

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This letter examines the dependence of the natural frequency in a microelectromechanical resonator on externally applied acceleration. The particular structure studied is an electrostatically coupled, single anchored, double-ended silicon tuning fork. The authrors find that the acceleration dependence in this resonator is primarily due to axial stress on the resonator beams. Measurements show an acceleration sensitivity Δf f0 of 7× 10-9 g, which is comparable to values found for typical quartz crystal resonators. This result was obtained using dynamic (vibration) measurements, and validated using theoretical analysis and finite element simulations.

Original languageEnglish
Article number014103
JournalApplied Physics Letters
Issue number1
StatePublished - 2007 Jan 15

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    Agarwal, M., Park, K. K., Chandorkar, S. A., Candler, R. N., Kim, B., Hopcroft, M. A., Melamud, R., Kenny, T. W., & Murmann, B. (2007). Acceleration sensitivity in beam-type electrostatic microresonators. Applied Physics Letters, 90(1), [014103].