• 2244 Citations
  • 23 h-Index
1991 …2019
If you made any changes in Pure, your changes will be visible here soon.

Fingerprint Fingerprint is based on mining the text of the experts' scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.

  • 1 Similar Profiles
Extreme ultraviolet lithography Engineering & Materials Science
Masks Engineering & Materials Science
masks Physics & Astronomy
lithography Physics & Astronomy
Gate dielectrics Engineering & Materials Science
Oxides Chemical Compounds
Phase shift Engineering & Materials Science
Lithography Engineering & Materials Science

Network Recent external collaboration on country level. Dive into details by clicking on the dots.

Research Output 1991 2019

Crystallized ZnO films by inserting the inert metal on ITO and their improved on/off current performance

Lee, T., Park, I. S., Chan Jung, Y., Seong, S., Kim, S. Y. & Ahn, J., 2019 Jul 1, In : Materials Science in Semiconductor Processing. 97, p. 85-90 6 p.

Research output: Contribution to journalArticleResearchpeer-review

ITO (semiconductors)

Interface-Driven Phase Transition of Phase-Change Material

Choi, M., Choi, H., Ahn, J. & Kim, Y. T., 2019 Apr 3, In : Crystal Growth and Design. 19, 4, p. 2123-2130 8 p.

Research output: Contribution to journalArticleResearchpeer-review

phase change materials
Phase change materials
Phase transitions
interfacial energy
Gibbs free energy

Investigation of the mechanical/thermal properties of nano-scale silicon nitride membranes

Jang, Y. J., Shin, H. J., Wi, S. J., Kim, H. N., Lee, G. S. & Ahn, J., 2019 Jan 1, In : Journal of Korean Institute of Metals and Materials. 57, 2, p. 124-129 6 p.

Research output: Contribution to journalArticleResearchpeer-review

Open Access
Silicon Nitride
Thermal Properties
Silicon nitride
Mechanical Properties
1 Citation (Scopus)

Characterization of Free-Standing Nano-Membranes by Using Ellipsometry

Park, S., Lee, C., An, I., Kim, M. S., Park, J. G. & Ahn, J., 2018 Apr 1, In : Journal of the Korean Physical Society. 72, 8, p. 868-872 5 p.

Research output: Contribution to journalArticleResearchpeer-review

accident prevention

Development of full-size EUV pellicle with thermal emission layer coating

Hong, J., Park, C., Lee, C., Nam, K., Jang, Y., Wi, S. & Ahn, J., 2018 Jan 1, International Conference on Extreme Ultraviolet Lithography 2018. Naulleau, P. P., Gargini, P. A., Itani, T., Hendrickx, E. & Ronse, K. G. (eds.). SPIE, 108090R. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10809).

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

thermal emission
Extreme ultraviolet lithography
Extreme Ultraviolet Lithography