• 2244 Citations
  • 23 h-Index
1991 …2019
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  • 1 Similar Profiles
Extreme ultraviolet lithography Engineering & Materials Science
Masks Engineering & Materials Science
masks Physics & Astronomy
lithography Physics & Astronomy
Gate dielectrics Engineering & Materials Science
Oxides Chemical Compounds
Phase shift Engineering & Materials Science
Lithography Engineering & Materials Science

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Research Output 1991 2019

Crystallized ZnO films by inserting the inert metal on ITO and their improved on/off current performance

Lee, T., Park, I. S., Chan Jung, Y., Seong, S., Kim, S. Y. & Ahn, J., 2019 Jul 1, In : Materials Science in Semiconductor Processing. 97, p. 85-90 6 p.

Research output: Contribution to journalArticleResearchpeer-review

ITO (semiconductors)
Metals
Resistors
resistors
metals

Interface-Driven Phase Transition of Phase-Change Material

Choi, M., Choi, H., Ahn, J. & Kim, Y. T., 2019 Apr 3, In : Crystal Growth and Design. 19, 4, p. 2123-2130 8 p.

Research output: Contribution to journalArticleResearchpeer-review

phase change materials
Phase change materials
Phase transitions
interfacial energy
Gibbs free energy

Investigation of the mechanical/thermal properties of nano-scale silicon nitride membranes

Jang, Y. J., Shin, H. J., Wi, S. J., Kim, H. N., Lee, G. S. & Ahn, J., 2019 Jan 1, In : Journal of Korean Institute of Metals and Materials. 57, 2, p. 124-129 6 p.

Research output: Contribution to journalArticleResearchpeer-review

Open Access
Silicon Nitride
Thermal Properties
Silicon nitride
Mechanical Properties
Membrane
1 Citation (Scopus)

Characterization of Free-Standing Nano-Membranes by Using Ellipsometry

Park, S., Lee, C., An, I., Kim, M. S., Park, J. G. & Ahn, J., 2018 Apr 1, In : Journal of the Korean Physical Society. 72, 8, p. 868-872 5 p.

Research output: Contribution to journalArticleResearchpeer-review

pellicle
ellipsometry
membranes
lithography
accident prevention

Development of full-size EUV pellicle with thermal emission layer coating

Hong, J., Park, C., Lee, C., Nam, K., Jang, Y., Wi, S. & Ahn, J., 2018 Jan 1, International Conference on Extreme Ultraviolet Lithography 2018. Naulleau, P. P., Gargini, P. A., Itani, T., Hendrickx, E. & Ronse, K. G. (eds.). SPIE, 108090R. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10809).

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

pellicle
thermal emission
Coating
Extreme ultraviolet lithography
Extreme Ultraviolet Lithography