• 2260 Citations
  • 24 h-Index
1991 …2019
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  • 2 Similar Profiles
Extreme ultraviolet lithography Engineering & Materials Science
Masks Engineering & Materials Science
masks Physics & Astronomy
lithography Physics & Astronomy
Gate dielectrics Engineering & Materials Science
Oxides Chemical Compounds
Phase shift Engineering & Materials Science
Lithography Engineering & Materials Science

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Research Output 1991 2019

Characteristics of band modulation FET on sub 10 nm SOI

Kwon, S., Navarro, C., Gamiz, F., Cristoloveanu, S., Galy, P., Choi, M., Kim, Y. T. & Ahn, J., 2019 Jan 1, In : Japanese Journal of Applied Physics. 58, SB, SBBB07.

Research output: Contribution to journalArticleResearchpeer-review

Open Access
SOI (semiconductors)
Field effect transistors
field effect transistors
Modulation
modulation

Crystallized ZnO films by inserting the inert metal on ITO and their improved on/off current performance

Lee, T., Park, I. S., Chan Jung, Y., Seong, S., Kim, S. Y. & Ahn, J., 2019 Jul 1, In : Materials Science in Semiconductor Processing. 97, p. 85-90 6 p.

Research output: Contribution to journalArticleResearchpeer-review

ITO (semiconductors)
Metals
Resistors
resistors
metals

Fe3O4–ZnO Core–Shell Nanoparticles Fabricated by Ultra-Thin Atomic Layer Deposition Technique as a Drug Delivery Vehicle

Seong, S., Park, I. S., Jung, Y. C., Lee, T., Kim, S. Y., Lee, S. J. & Ahn, J., 2019 Jul 1, In : Electronic Materials Letters. 15, 4, p. 493-499 7 p.

Research output: Contribution to journalArticleResearchpeer-review

Atomic layer deposition
Drug delivery
Cells
Nanoparticles
Ibuprofen
1 Citation (Scopus)

Interface-Driven Phase Transition of Phase-Change Material

Choi, M., Choi, H., Ahn, J. & Kim, Y. T., 2019 Apr 3, In : Crystal Growth and Design. 19, 4, p. 2123-2130 8 p.

Research output: Contribution to journalArticleResearchpeer-review

phase change materials
Phase change materials
Phase transitions
interfacial energy
Gibbs free energy

Investigation of the mechanical/thermal properties of nano-scale silicon nitride membranes

Jang, Y. J., Shin, H. J., Wi, S. J., Kim, H. N., Lee, G. S. & Ahn, J., 2019 Jan 1, In : Journal of Korean Institute of Metals and Materials. 57, 2, p. 124-129 6 p.

Research output: Contribution to journalArticleResearchpeer-review

Open Access
Silicon Nitride
Thermal Properties
Silicon nitride
Mechanical Properties
Membrane